Ibbs, K. G. <br/><br/>
Laser chemical processing for microelectronics 

 - 
 - Cambridge,  Cambridge University Press,  1989 
 - 172 p.,  ,  Book  
<br/><br/> International School of Photonics 
<br/><br/><label>ISBN: </label>0-521-32254-5 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Lasers- industrial applicationsLasers- industrial applicationsIntegrated circuits-design and construction  
<br/><br/><label>Dewey Class. No.: </label>535.374