TY  - BOOK
AU  - Ibbs, K. G.
AU  - Osgood, R. M
TI  -  Laser chemical processing for microelectronics
SN  - 0-521-32254-5
U1  - 535.374 
PY  - 1989///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Lasers- industrial applicationsLasers- industrial applicationsIntegrated circuits-design and construction
N1  - International School of Photonics
ER  -