Ehrlich, Daniel, J. <br/><br/>
Laser microfabrication : thin film processes and lithography 

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 - Sandiego,  Academic Press,  1989 
 - xii,587 p.,  ,  Book  
<br/><br/> International School of Photonics 
<br/><br/><label>ISBN: </label>0-12-233430-2 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Lasers- industrial applicationsLasers- industrial applicationsMicrolithography  
<br/><br/><label>Dewey Class. No.: </label>535.374