TY  - BOOK
AU  - Ehrlich, Daniel, J.
AU  - Tsao, Jeffrey, Y.
TI  -  Laser microfabrication : thin film processes and lithography
SN  - 0-12-233430-2
U1  - 535.374 
PY  - 1989///
CY  - Sandiego
PB  - Academic Press
KW  - Lasers- industrial applicationsLasers- industrial applicationsMicrolithography
N1  - International School of Photonics
ER  -