TY  - BOOK
AU  - Rao, V. V.
AU  - ...[et al.]
TI  -  Vacuum science and technology
SN  - 81-7023-763-7
U1  - 66.982 
PY  - 1998///
CY  - New Delhi
PB  - Allied
KW  - Vacuum production-principlesVacuum production-principles
N1  - International School of Photonics
ER  -