TY - BOOK AU - Tandon, U. S. AU - Khokle, W. S. TI - Pattering of material layers in submicron region SN - 81-224-0561-4 U1 - 621.38 PY - 1993/// CY - New Delhi PB - Wiley Eastern KW - ElectronicsElectronicsAmplifiers- electronicsCyberneticsdigital electronicsElectric conductors N1 - International School of Photonics ER -