Santos, Héctor J. de los. <br/><br/>
Principles and applications of NanoMEMS physics / 
by Héctor J. De Los Santos. 
 - Dordrecht, The Netherlands :  Springer,  c2005. 
 - xv, 254 p. :  ill. ;  25 cm. 
 - Microsystems ;  15 .
 - Microsystems (Series) ;  v. 15. .
<br/><br/><label>ISBN: </label>1402032382 
<br/><br/><label>Subjects--Index Terms: </label>Principles and applications - NanoMEMS physics / 
<br/><br/><label>Dewey Class. No.: </label>537.5  / SAN