TY  - BOOK
AU  - Santos,Héctor J.de los
TI  - Principles and applications of NanoMEMS physics
T2  - Microsystems
SN  - 1402032382
U1  - 537.5 
PY  - 2005///
CY  - Dordrecht, The Netherlands
PB  - Springer
KW  - Principles and applications - NanoMEMS physics
UR  - http://www.loc.gov/catdir/toc/ecip0513/2005015829.html
UR  - http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html
ER  -