TY  - BOOK
AU  - May,Gary.S
AU  - Sze,Simon.M.
TI  - Fundamentals of Semiconductor Fabrication
SN  - 981253072x
U1  - 660.2977 
PY  - 2004///
CY  - New Jersey
PB  - John Wiley
KW  - Semiconductor Fabrication
ER  -