May,Gary S. <br/><br/>
Fundamentals of Semiconductor Manufacturing and Process Control 

 - UK  John Wiley&Sons  2006 
 - xvi,441p. 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductor-Design and Construction Process Control-Statistical Method 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY