TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas.J.
TI  - Fundamentals of Semiconductor Manufacturing and Process Control
SN  - 0471784060
U1  - 621.38152 
PY  - 2006///
CY  - UK
PB  - John Wiley&Sons
KW  - Semiconductor-Design and Construction
KW  - Process Control-Statistical Method
ER  -