Lobontiu, Nicolae <br/><br/>
Mechanics of micro electromechanical systems 

 - Newyork  Kluwer academic publishers  2005 
 - viii, 405p 
<br/><br/><label>ISBN: </label>9788181288493 
<br/><br/><label>Dewey Class. No.: </label>621.381  / LOB