TY  - BOOK
AU  - Hsu Tai-Ran
TI  - MEMS & Microsystems: Design and Manufacture
SN  - 9780070487093
U1  - 621.381 
CY  - New Delhi
PB  - McGraw Hill Company
KW  - Microsensors, Scaling, Substraters and Wafers, Photolithography
ER  -