Advanced Micro & Nanosystems   CMOS-MEMS 

 - Editors O Brand & G K Fedder 
 - Germany  WILEY-VCH 
 - 594p. 
 -  Volume 2 .
<br/><br/><label>ISBN: </label>9783527310807 
<br/><br/><label>Subjects--Index Terms: </label>Fabrication Technology, Monolithically Integrated Inertial Sensors, RF CMOS MEMS, Biometric Capacitive CMOS Fingerprint Sensor Systems 
<br/><br/><label>Dewey Class. No.: </label>621.3815