TY  - BOOK
TI  - Advanced Micro & Nanosystems : CMOS-MEMS
SN  - 9783527310807
U1  - 621.3815 
CY  - Germany
PB  - WILEY-VCH
KW  - Fabrication Technology, Monolithically Integrated Inertial Sensors, RF CMOS MEMS, Biometric Capacitive CMOS Fingerprint Sensor Systems
ER  -