Zant, Van Peter <br/><br/>
Microchip Fabrication  A Practical Guide to Semiconductor Processing 

 - 4th ed 
 - Boston  McGraw Hill Companies Inc 
 - 632p. 
<br/><br/><label>ISBN: </label>9780071184212 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductor Industry, Semiconductor Materials, Process Chemicals, Manufacturing Wafers, Wafer Fabrication, Contamination Control, Process Yields 
<br/><br/><label>Dewey Class. No.: </label>621.3815