TY  - BOOK
AU  - Zant, Van Peter
TI  - Microchip Fabrication: A Practical Guide to Semiconductor Processing
SN  - 9780071184212
U1  - 621.3815 
CY  - Boston
PB  - McGraw Hill Companies Inc
KW  - Semiconductor Industry, Semiconductor Materials, Process Chemicals, Manufacturing Wafers, Wafer Fabrication, Contamination Control, Process Yields
ER  -