Zant, Van Peter <br/><br/>
Microchip Fabrication  A Practical Guide to Semiconductor Processing 

 - 5th ed 
 - New York  McGraw Hill 
 - 642p. 
<br/><br/><label>ISBN: </label>639785507727 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductor Industry, Productivity, Process Yields, Crystal Growth, Contamination Control, Ten-Step Patterning Process 
<br/><br/><label>Dewey Class. No.: </label>621.3916