TY  - BOOK
AU  - Zant, Van Peter
TI  - Microchip Fabrication: A Practical Guide to Semiconductor Processing
SN  - 639785507727
U1  - 621.3916 
CY  - New York
PB  - McGraw Hill
KW  - Semiconductor Industry, Productivity, Process Yields, Crystal Growth, Contamination Control, Ten-Step Patterning Process
ER  -