Optical Inspection of Microsystems 

 - Edited by Wolfgang Osten 
 - Boca Raton  CRC Press 
 - 503p. 
 - Optical Science and Engineering .
<br/><br/><label>ISBN: </label>9780849336829 
<br/><br/><label>Subjects--Index Terms: </label>Image Processing, Optical Profiling Techniques, Grating Interferometry, Measuring MEMS, Laser Doppler Vibrometry 
<br/><br/><label>Dewey Class. No.: </label>670.425