TY  - BOOK
TI  - Optical Inspection of Microsystems
T2  - Optical Science and Engineering
SN  - 9780849336829
U1  - 670.425 
CY  - Boca Raton
PB  - CRC Press
KW  - Image Processing, Optical Profiling Techniques, Grating Interferometry, Measuring MEMS, Laser Doppler Vibrometry
ER  -