Madou, Marc <br/><br/>
Fundamentals of Microfabrication 

 - Boca Raton  CRC Press 
 - 589p. 
<br/><br/><label>ISBN: </label>9780849394515 
<br/><br/><label>Subjects--Index Terms: </label>Microfabrication Applications, Scaling Laws, Actuators, Micromachine Development, Packing, LIGA, Micromachining Techniques 
<br/><br/><label>Dewey Class. No.: </label>621.38152