TY  - BOOK
AU  - Madou, Marc
TI  - Fundamentals of Microfabrication
SN  - 9780849394515
U1  - 621.38152 
CY  - Boca Raton
PB  - CRC Press
KW  - Microfabrication Applications, Scaling Laws, Actuators, Micromachine Development, Packing, LIGA, Micromachining Techniques
ER  -