Campbell, A Stephen <br/><br/>
The Science and Engineering of Microelectronic Fabrication 

 - 2nd ed 
 - New York  Oxford University Press 
 - 603p. 
 - The Oxford Series in Electrical and Computer Engineering .
<br/><br/><label>ISBN: </label>978019513605 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductor Substrates, Unit Process, Thermal Oxidation, Ion Implantation, Optical Lithography 
<br/><br/><label>Dewey Class. No.: </label>621.38152