TY  - BOOK
AU  - Campbell, A Stephen
TI  - The Science and Engineering of Microelectronic Fabrication
T2  - The Oxford Series in Electrical and Computer Engineering
SN  - 978019513605
U1  - 621.38152 
CY  - New York
PB  - Oxford University Press
KW  - Semiconductor Substrates, Unit Process, Thermal Oxidation, Ion Implantation, Optical Lithography
ER  -