Nagchoudhuri, D <br/><br/>
Principles of Microelectronics Technology 

 - Delhi  Wheeler Publishing House 
 - 585p. 
<br/><br/><label>ISBN: </label>8175440031 
<br/><br/><label>Subjects--Index Terms: </label>Mask-Making, Lithography, Diffusion, Physical Vapor Deposition, BEOL Processing 
<br/><br/><label>Dewey Class. No.: </label>621.3817