TY  - BOOK
AU  - Nagchoudhuri, D
TI  - Principles of Microelectronics Technology
SN  - 8175440031
U1  - 621.3817 
CY  - Delhi
PB  - Wheeler Publishing House
KW  - Mask-Making, Lithography, Diffusion, Physical Vapor Deposition, BEOL Processing
ER  -