TY  - BOOK
AU  - CHANG LIU
ED  - VAISHALI B MUNGURVADI,
TI  - FOUNDATIONS OF MEMS
SN  - 9788131764756
U1  - 621.3 
PY  - 2018///
CY  - CHENNAI
PB  - PEARSON
KW  - INTRODUCTION TO MICROFABRICATION
KW  - ESSENCIAL ELECTRICAL AND MECHANICAL CONCEPTS
KW  - ELECTROSTATIC SENSING AND ACTUATION
ER  -