Einspruch,Norman G <br/><br/>
VLSI electronics microstructure science  lithography for VLSI 

 - Orlando  Academic Press,Inc.  1987 
 - xi,361p. 
<br/><br/><label>ISBN: </label>0122341163 
<br/><br/><label>Subjects--Index Terms: </label>integrated circuits -VLSI 
<br/><br/><label>Dewey Class. No.: </label>621.395  / EIN