TY  - BOOK
AU  - Einspruch,Norman G
AU  - Watts,R K
TI  - VLSI electronics microstructure science: lithography for VLSI
SN  - 0122341163
U1  - 621.395 
PY  - 1987///
CY  - Orlando
PB  - Academic Press,Inc.
KW  - integrated circuits -VLSI
ER  -