Gise,Peter <br/><br/>
Semiconductor fabrication technology 

 - New Jersey  Prentice Hall  1986 
 - vii,264p. 
<br/><br/><label>ISBN: </label>083594843 
<br/><br/><label>Subjects--Index Terms: </label>semiconductor fabrication technology 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GIS