Levy,R A <br/><br/>
Microelectronic materials and processes 

 - London  Kluwer Acadmic Press  1986 
 - xiv,981p. 
 - series E : Applied sciences   164 .
<br/><br/><label>ISBN: </label>0792301471 
<br/><br/><label>Subjects--Index Terms: </label>microelectronic materials  microelectronic processes 
<br/><br/><label>Dewey Class. No.: </label>621.381 046  / LEV