TY  - BOOK
AU  - Levy,R A
TI  - Microelectronic materials and processes
T2  - series E : Applied sciences 
SN  - 0792301471
U1  - 621.381 046 
PY  - 1986///
CY  - London
PB  - Kluwer Acadmic Press
KW  - microelectronic materials
KW  - microelectronic processes
ER  -