Leondes,Cornelius T <br/><br/>
MEMS/NEMS handbook techniques and applications 

 - New York  Springer Science+Business Media  2006 
 - vol.1, xviii,380p.  vol.2,xviii,332p.  vol.3,xv,434p.  vol.4,xviii,386p.  vol.5,xviii,556p. 
<br/><br/> Vol.1: Design methods in MEMS/NEMS.<br/>Vol.2: Fabrication techniques.<br/>Vol.3: Manufacturing methods.<br/>Vol.4: Sensors & actuators.<br/>Vol.5: Medical applications and MOEMS. 
<br/><br/><label>ISBN: </label>9780387245202 
<br/><br/><label>Subjects--Index Terms: </label>microelectromechanical systems - design and construction  nanotechnology  MEMS/NEMS 
<br/><br/><label>Dewey Class. No.: </label>621.381 04 M  / LEO