Ibbs, K.G.  <br/><br/>
Laser Chemical Processing for Microelectronics 

 - Cambridge  Cambridge University Press  1989 
 - 192 p. 
<br/><br/><label>ISBN: </label>0521322545 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Laser Chemical Processing
<br/><br/><label>Dewey Class. No.: </label>621.381  / IBB