TY  - BOOK
AU  - Ibbs, K.G. 
AU  - Osgood, R.M. 
TI  - Laser Chemical Processing for Microelectronics
SN  - 0521322545
U1  - 621.381 
PY  - 1989///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Microelectronics
KW  - Laser Chemical Processing
ER  -