Ehrlich, Daniel J.  <br/><br/>
Laser microfabrication: thin film process and lithography 

 - Boston  Academic Press  1989 
 - 587p. 
<br/><br/><label>ISBN: </label>0122334302 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Laser microfabrication
<br/><br/><label>Dewey Class. No.: </label>621.36/6  / EHR