TY  - BOOK
AU  - Ehrlich, Daniel J. 
AU  - Tsao,Jeffrey Y. 
TI  - Laser microfabrication: thin film process and lithography
SN  - 0122334302
U1  -  621.36/6 
PY  - 1989///
CY  - Boston
PB  - Academic Press
KW  - Laser microfabrication
ER  -