Tandon, U S <br/><br/>
Patterning of Material Layers in Submicron Region 

 - New Delhi  Wiley Eastern Limited  1993 
 - 183p. 
<br/><br/><label>ISBN: </label>8122405614 
<br/><br/><label>Dewey Class. No.: </label>621.381531  / TAN