TY  - BOOK
AU  - Westwood,William D.
AU  - Waterhouse,N.
AU  - Wilcox,P.S.
TI  - Tantalum thin films
SN  - 0127447504
U1  - 621.381/73 
PY  - 1975///
CY  - London
PB  - Academic Press
KW  - Tantalum films
ER  -