Laser diagnostics and photochemical processing for semiconductor devices :  symposium held November 1982 in Boston, Massachusetts, U.S.A. / 
editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg. 
 - New York :  North-Holland,  c1983. 
 - xiii, 298 p. :  ill. ;  24 cm. 
 - Material research society symposia proceedings;  v. 17 .
<br/><br/> "Sponsored by the Air Force Office of Scientific Research"--T.p. verso. 
<br/><br/><label>ISBN: </label>0444007822  
<br/><br/><label>Subjects--Index Terms: </label>Lasers--Industrial applications--Congresses.  Semiconductors--Congresses. 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / OSG