TY  - BOOK
AU  - Osgood,R.M.,ed
AU  - Brueck,S.R.J.,ed
AU  - Schlossberg,H.R.,ed
ED  - United States.
TI  - Laser diagnostics and photochemical processing for semiconductor devices: symposium held November 1982 in Boston, Massachusetts, U.S.A. 
T2  - Material research society symposia proceedings
SN  - 0444007822 
U1  - 621.3815/2 
PY  - 1983///
CY  - New York
PB  - North-Holland
KW  - Lasers--Industrial applications--Congresses
KW  - Semiconductors--Congresses
N1  - "Sponsored by the Air Force Office of Scientific Research"--T.p. verso
ER  -