TY  - BOOK
AU  - Poate,J.M.,ed
AU  - Mayer,James W.,ed
TI  - Laser annealing of semiconductors
SN  - 0125588208
U1  - 621.3815/2 
PY  - 1982///
CY  - New York
PB  - Academic Press
KW  - Semiconductor industry--Laser use in--Congresses
KW  - Semiconductors
ER  -