Rimini, Emanuele <br/><br/>
Ion implantation :  basics to device fabrication / 
by Emanuele Rimini. 
 - Boston :  Kluwer Academic Publishers,  c1995. 
 - xii, 393 p. :  ill. ;  25 cm. 
 - The Kluwer international series in engineering and computer science ;  Electronic materials, science and technology  SECS 293. .
 - Kluwer international series in engineering and computer science ;  SECS 293. Kluwer international series in engineering and computer science.  Electronic materials, science and technology. .
<br/><br/><label>ISBN: </label>0792395204  
<br/><br/><label>Subjects--Index Terms: </label>Ion implantation  Semiconductor doping  Semiconductors--Design and construction 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2  / RIM