TY  - BOOK
AU  - Rimini,Emanuele
TI  - Ion implantation: basics to device fabrication 
T2  - The Kluwer international series in engineering and computer science
SN  - 0792395204 
U1  - 621.3815/2 
PY  - 1995///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Ion implantation
KW  - Semiconductor doping
KW  - Semiconductors--Design and construction
ER  -