TY  - BOOK
AU  - Delchar,T.A.
TI  - Vacuum physics and techniques
T2  - Physics and its applications
SN  - 0412465906 
U1  - 533/.5 
PY  - 1993///
CY  - London
PB  - Chapman & Hall
KW  - Vacuum
KW  - Vacuum technology
ER  -