Htoo, Maung S.

Microelectronic polymers Maung S. Htoo. - New York M. Dekker 1989. - ix, 407 p. : ill. ; 24 cm.

0824779908

Polymers Microlithography--Materials Microelectronics--Materials. Polymers-application Microelectronics-materials Polymers-application in microelectronics Lithographic polymers

678.06:62 / HTO