Htoo, Maung S.
Microelectronic polymers
Maung S. Htoo.
- New York M. Dekker 1989.
- ix, 407 p. : ill. ; 24 cm.
0824779908
Polymers Microlithography--Materials Microelectronics--Materials. Polymers-application Microelectronics-materials Polymers-application in microelectronics Lithographic polymers
678.06:62 / HTO