TY  - BOOK
AU  - Htoo, Maung S. 
AU  - Htoo,Maung S.
TI  - Microelectronic polymers 
SN  - 0824779908
U1  - 678.06:62 
PY  - 1989///
CY  - New York 
PB  - M. Dekker
KW  - Polymers
KW  - Microlithography--Materials
KW  - Microelectronics--Materials
KW  - Polymers-application
KW  - Microelectronics-materials
KW  - Polymers-application in microelectronics
KW  - Lithographic polymers
ER  -