Hierlemann, Andreas <br/><br/>
Integrated chemical microsensor systems in CMOS technology 

 - New York  Springer  2005 
 - x, 229p. 
<br/><br/> Microtechnology and MEMS 
<br/><br/><label>ISBN: </label>3-540-23782-8 
<br/><br/><label>Subjects--Index Terms: </label>Microsenor systems - Chemical  Chemical microsensor system  CMOS  Metal oxide semiconductor  Microelectromechanical systems 
<br/><br/><label>Universal Decimal Class. No.: </label>621.3.049.77