TY  - BOOK
AU  - Hierlemann, Andreas
TI  - Integrated chemical microsensor systems in CMOS technology
SN  - 3-540-23782-8
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Microsenor systems - Chemical
KW  - Chemical microsensor system
KW  - CMOS
KW  - Metal oxide semiconductor
KW  - Microelectromechanical systems
N1  - Microtechnology and MEMS
ER  -